MOEMS electrostatic scanning micromirrors design and fabrication

Patterson P., HAH D. , Toshiyoshi H., Wu M. C.

201st Meeting of the Electrochemical Society – 1st International Symposium on Integrated Optoelectronics, Philadelphia, United States Of America, 12 - 17 May 2002, pp.369-380

  • Publication Type: Conference Paper / Full Text
  • City: Philadelphia
  • Country: United States Of America
  • Page Numbers: pp.369-380