P. Patterson Et Al. , "MOEMS electrostatic scanning micromirrors design and fabrication," 1st International Symposium on Integrated Electronics , vol.2002, Pennsylvania, United States Of America, pp.369-380, 2002
Patterson, P. Et Al. 2002. MOEMS electrostatic scanning micromirrors design and fabrication. 1st International Symposium on Integrated Electronics , (Pennsylvania, United States Of America), 369-380.
Patterson, P., Hah, D., Su, G., Toshiyoshi, H., & Wu, M., (2002). MOEMS electrostatic scanning micromirrors design and fabrication . 1st International Symposium on Integrated Electronics (pp.369-380). Pennsylvania, United States Of America
Patterson, PR Et Al. "MOEMS electrostatic scanning micromirrors design and fabrication," 1st International Symposium on Integrated Electronics, Pennsylvania, United States Of America, 2002
Patterson, PR Et Al. "MOEMS electrostatic scanning micromirrors design and fabrication." 1st International Symposium on Integrated Electronics , Pennsylvania, United States Of America, pp.369-380, 2002
Patterson, P. Et Al. (2002) . "MOEMS electrostatic scanning micromirrors design and fabrication." 1st International Symposium on Integrated Electronics , Pennsylvania, United States Of America, pp.369-380.
@conferencepaper{conferencepaper, author={PR Patterson Et Al. }, title={MOEMS electrostatic scanning micromirrors design and fabrication}, congress name={1st International Symposium on Integrated Electronics}, city={Pennsylvania}, country={United States Of America}, year={2002}, pages={369-380} }