An angular vertical comb drive actuator for scanning micromirrors

Patterson P., HAH D. , Chang H., Toshiyoshi H., Wu M. C.

International Conference on Optical MEMS and Their Applications, Okinawa, Japan, 25 - 28 September 2001, pp.25-26

  • Publication Type: Conference Paper / Full Text
  • City: Okinawa
  • Country: Japan
  • Page Numbers: pp.25-26