P. Patterson Et Al. , "An angular vertical comb drive actuator for scanning micromirrors," International Conference on Optical MEMS and Their Applications , Okinawa, Japan, pp.25-26, 2001
Patterson, P. Et Al. 2001. An angular vertical comb drive actuator for scanning micromirrors. International Conference on Optical MEMS and Their Applications , (Okinawa, Japan), 25-26.
Patterson, P., HAH, D., Chang, H., Toshiyoshi, H., & Wu, M. C., (2001). An angular vertical comb drive actuator for scanning micromirrors . International Conference on Optical MEMS and Their Applications (pp.25-26). Okinawa, Japan
Patterson, PR Et Al. "An angular vertical comb drive actuator for scanning micromirrors," International Conference on Optical MEMS and Their Applications, Okinawa, Japan, 2001
Patterson, PR Et Al. "An angular vertical comb drive actuator for scanning micromirrors." International Conference on Optical MEMS and Their Applications , Okinawa, Japan, pp.25-26, 2001
Patterson, P. Et Al. (2001) . "An angular vertical comb drive actuator for scanning micromirrors." International Conference on Optical MEMS and Their Applications , Okinawa, Japan, pp.25-26.
@conferencepaper{conferencepaper, author={PR Patterson Et Al. }, title={An angular vertical comb drive actuator for scanning micromirrors}, congress name={International Conference on Optical MEMS and Their Applications}, city={Okinawa}, country={Japan}, year={2001}, pages={25-26} }