Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures


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Tsai J., Hsieh T., Liao C., Chiou S., Hah D. , Wu M. C.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol.19, no.4, 2009 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 19 Issue: 4
  • Publication Date: 2009
  • Doi Number: 10.1088/0960-1317/19/4/045002
  • Title of Journal : JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Abstract

In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar spring structure to achieve two rotational degrees of freedom (DOFs) without employing any gimbal. Both the actuators and torsion springs are hidden underneath the mirror to obtain a small form factor. The devices are fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Devices with different combinations of parameter values are experimentally characterized and compared.