Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures


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Tsai J., Hsieh T., Liao C., Chiou S., Hah D., Wu M. C.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol.19, no.4, 2009 (SCI-Expanded) identifier identifier

Abstract

In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar spring structure to achieve two rotational degrees of freedom (DOFs) without employing any gimbal. Both the actuators and torsion springs are hidden underneath the mirror to obtain a small form factor. The devices are fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Devices with different combinations of parameter values are experimentally characterized and compared.