Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, cilt.19, sa.4, 2009 (SCI-Expanded)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 19 Sayı: 4
- Basım Tarihi: 2009
- Doi Numarası: 10.1088/0960-1317/19/4/045002
- Dergi Adı: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Abdullah Gül Üniversitesi Adresli: Hayır
Özet
In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar spring structure to achieve two rotational degrees of freedom (DOFs) without employing any gimbal. Both the actuators and torsion springs are hidden underneath the mirror to obtain a small form factor. The devices are fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Devices with different combinations of parameter values are experimentally characterized and compared.