J. Tsai Et Al. , "Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4, 2009
Tsai, J. Et Al. 2009. Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4 .
Tsai, J., Hsieh, T., Liao, C., Chiou, S., Hah, D., & Wu, M. C., (2009). Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4.
Tsai, Jui-che Et Al. "Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4, 2009
Tsai, Jui-che Et Al. "Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4, 2009
Tsai, J. Et Al. (2009) . "Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.19, no.4.
@article{article, author={Jui-che Tsai Et Al. }, title={Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2009}