A two-axis MEMS scanner driven by radial vertical combdrive actuators

Chiou S., Hsieh T., Tsai J., Sun C., Hah D., Wu M. C.

IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualian, Taiwan, 12 - 16 August 2007, pp.83-84 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/omems.2007.4373851
  • City: Hualian
  • Country: Taiwan
  • Page Numbers: pp.83-84
  • Keywords: two-axis scanner, radial comb-drive actuators, small form factor, surface micromachining
  • Abdullah Gül University Affiliated: No


We report a two-axis MEMS scanner driven by radial vertical combdrive actuators. The device is fabricated by a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is designed to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Mechanical rotation angles of +/- 5.4 degrees at 42V and +/- 2.4 degrees at 63V are obtained for rotation about the lower and upper springs, respectively.