Chiou, S. Et Al. 2007. A two-axis MEMS scanner driven by radial vertical combdrive actuators. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , (Hualian, Taiwan), 83-84.

Chiou, S., Hsieh, T., Tsai, J., Sun, C., Hah, D., & Wu, M. C., (2007). A two-axis MEMS scanner driven by radial vertical combdrive actuators . IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (pp.83-84). Hualian, Taiwan

Chiou, Sheng-Jie Et Al. "A two-axis MEMS scanner driven by radial vertical combdrive actuators," IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualian, Taiwan, 2007

Chiou, Sheng-Jie Et Al. "A two-axis MEMS scanner driven by radial vertical combdrive actuators." IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , Hualian, Taiwan, pp.83-84, 2007

Chiou, S. Et Al. (2007) . "A two-axis MEMS scanner driven by radial vertical combdrive actuators." IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , Hualian, Taiwan, pp.83-84.

@conferencepaper{conferencepaper, author={Sheng-Jie Chiou Et Al. }, title={A two-axis MEMS scanner driven by radial vertical combdrive actuators}, congress name={IEEE/LEOS International Conference on Optical MEMS and Nanophotonics}, city={Hualian}, country={Taiwan}, year={2007}, pages={83-84} }