A scanning micromirror with angular comb drive actuation

Patterson P., Hah D., Nguyen H., Toshiyoshi H., Chao R., Wu M.

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Nevada, Amerika Birleşik Devletleri, 20 - 24 Ocak 2002, ss.544-547 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/memsys.2002.984329
  • Basıldığı Şehir: Nevada
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.544-547
  • Abdullah Gül Üniversitesi Adresli: Evet

Özet

We describe a single crystal silicon, 1 x 1 mm(2), scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electromechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of +/-18degrees at 1.4 kHz has been measured.