A scanning micromirror with angular comb drive actuation

Patterson P., Hah D., Nguyen H., Toshiyoshi H., Chao R., Wu M.

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Nevada, United States Of America, 20 - 24 January 2002, pp.544-547 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/memsys.2002.984329
  • City: Nevada
  • Country: United States Of America
  • Page Numbers: pp.544-547
  • Abdullah Gül University Affiliated: Yes


We describe a single crystal silicon, 1 x 1 mm(2), scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electromechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of +/-18degrees at 1.4 kHz has been measured.