A scanning micromirror with angular comb drive actuation

Patterson P., HAH D. , Nguyen H., Toshiyoshi H., Chao R., Wu M. C.

15th IEEE Micro Electro Mechanical Systems Conference, Las Vegas, United States Of America, 20 - 24 January 2002, pp.544-547

  • Publication Type: Conference Paper / Full Text
  • City: Las Vegas
  • Country: United States Of America
  • Page Numbers: pp.544-547