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A scanning micromirror with angular comb drive actuation
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P. Patterson Et Al. , "A scanning micromirror with angular comb drive actuation," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547, 2002

Patterson, P. Et Al. 2002. A scanning micromirror with angular comb drive actuation. 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , (Nevada, United States Of America), 544-547.

Patterson, P., Hah, D., Nguyen, H., Toshiyoshi, H., Chao, R., & Wu, M., (2002). A scanning micromirror with angular comb drive actuation . 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) (pp.544-547). Nevada, United States Of America

Patterson, PR Et Al. "A scanning micromirror with angular comb drive actuation," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Nevada, United States Of America, 2002

Patterson, PR Et Al. "A scanning micromirror with angular comb drive actuation." 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547, 2002

Patterson, P. Et Al. (2002) . "A scanning micromirror with angular comb drive actuation." 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547.

@conferencepaper{conferencepaper, author={PR Patterson Et Al. }, title={A scanning micromirror with angular comb drive actuation}, congress name={15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002)}, city={Nevada}, country={United States Of America}, year={2002}, pages={544-547} }