P. Patterson Et Al. , "A scanning micromirror with angular comb drive actuation," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547, 2002
Patterson, P. Et Al. 2002. A scanning micromirror with angular comb drive actuation. 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , (Nevada, United States Of America), 544-547.
Patterson, P., Hah, D., Nguyen, H., Toshiyoshi, H., Chao, R., & Wu, M., (2002). A scanning micromirror with angular comb drive actuation . 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) (pp.544-547). Nevada, United States Of America
Patterson, PR Et Al. "A scanning micromirror with angular comb drive actuation," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Nevada, United States Of America, 2002
Patterson, PR Et Al. "A scanning micromirror with angular comb drive actuation." 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547, 2002
Patterson, P. Et Al. (2002) . "A scanning micromirror with angular comb drive actuation." 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) , Nevada, United States Of America, pp.544-547.
@conferencepaper{conferencepaper, author={PR Patterson Et Al. }, title={A scanning micromirror with angular comb drive actuation}, congress name={15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002)}, city={Nevada}, country={United States Of America}, year={2002}, pages={544-547} }