Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators

HAH D., Huang S., Nguyen H., Chang H., Tsai J., Toshiyoshi H., ...More

Hilton Head 2002 Solid-State Sensor & Actuator Workshop, Hilton Head Island, United States Of America, 3 - 06 June 2002, pp.11-14

  • Publication Type: Conference Paper / Full Text
  • City: Hilton Head Island
  • Country: United States Of America
  • Page Numbers: pp.11-14
  • Abdullah Gül University Affiliated: Yes