D. HAH Et Al. , "Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators," Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.11-14, 2002
HAH, D. Et Al. 2002. Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators. Hilton Head 2002 Solid-State Sensor & Actuator Workshop , (Hilton Head Island, United States Of America), 11-14.
HAH, D., Huang, S., Nguyen, H., Chang, H., Tsai, J., Toshiyoshi, H., ... Wu, M. C.(2002). Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators . Hilton Head 2002 Solid-State Sensor & Actuator Workshop (pp.11-14). Hilton Head Island, United States Of America
HAH, DOOYOUNG Et Al. "Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators," Hilton Head 2002 Solid-State Sensor & Actuator Workshop, Hilton Head Island, United States Of America, 2002
HAH, DOOYOUNG Et Al. "Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators." Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.11-14, 2002
HAH, D. Et Al. (2002) . "Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators." Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.11-14.
@conferencepaper{conferencepaper, author={DOOYOUNG HAH Et Al. }, title={Low voltage MEMS micromirror arrays with hidden vertical comb-drive actuators}, congress name={Hilton Head 2002 Solid-State Sensor & Actuator Workshop}, city={Hilton Head Island}, country={United States Of America}, year={2002}, pages={11-14} }