A novel tunable MEMS capacitor based on angled vertical comb drive actuators


Nguyen H., HAH D. , Patterson P., Chao R., Piyawattanametha W., Wu M. C.

Hilton Head 2002 Solid-State Sensor & Actuator Workshop, Hilton Head Island, United States Of America, 3 - 06 June 2002, pp.277-280

  • Publication Type: Conference Paper / Full Text
  • City: Hilton Head Island
  • Country: United States Of America
  • Page Numbers: pp.277-280