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A novel tunable MEMS capacitor based on angled vertical comb drive actuators
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H. Nguyen Et Al. , "A novel tunable MEMS capacitor based on angled vertical comb drive actuators," Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.277-280, 2002

Nguyen, H. Et Al. 2002. A novel tunable MEMS capacitor based on angled vertical comb drive actuators. Hilton Head 2002 Solid-State Sensor & Actuator Workshop , (Hilton Head Island, United States Of America), 277-280.

Nguyen, H., HAH, D., Patterson, P., Chao, R., Piyawattanametha, W., & Wu, M. C., (2002). A novel tunable MEMS capacitor based on angled vertical comb drive actuators . Hilton Head 2002 Solid-State Sensor & Actuator Workshop (pp.277-280). Hilton Head Island, United States Of America

Nguyen, HD Et Al. "A novel tunable MEMS capacitor based on angled vertical comb drive actuators," Hilton Head 2002 Solid-State Sensor & Actuator Workshop, Hilton Head Island, United States Of America, 2002

Nguyen, HD Et Al. "A novel tunable MEMS capacitor based on angled vertical comb drive actuators." Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.277-280, 2002

Nguyen, H. Et Al. (2002) . "A novel tunable MEMS capacitor based on angled vertical comb drive actuators." Hilton Head 2002 Solid-State Sensor & Actuator Workshop , Hilton Head Island, United States Of America, pp.277-280.

@conferencepaper{conferencepaper, author={HD Nguyen Et Al. }, title={A novel tunable MEMS capacitor based on angled vertical comb drive actuators}, congress name={Hilton Head 2002 Solid-State Sensor & Actuator Workshop}, city={Hilton Head Island}, country={United States Of America}, year={2002}, pages={277-280} }