A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Hah D., Choi C., Jun C., Kim Y.

IEEE/LEOS International Conference on Optical MEMS, Hawaii, Amerika Birleşik Devletleri, 18 - 21 Ağustos 2003, ss.151-152 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/omems.2003.1233511
  • Basıldığı Şehir: Hawaii
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.151-152
  • Abdullah Gül Üniversitesi Adresli: Evet

Özet

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of +/-1.4degrees at 66 V-DC was achieved for a 1-mm-diameter micromirror.