IEEE/LEOS International Conference on Optical MEMS, Hawaii, United States Of America, 18 - 21 August 2003, pp.151-152
A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of +/-1.4degrees at 66 V-DC was achieved for a 1-mm-diameter micromirror.