A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

HAH D. , Choi C., Jun C., Kim Y.

International Conference on Optical MEMS and Their Applications, 18 - 21 Ağustos 2003, ss.151-152

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Sayfa Sayıları: ss.151-152