A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Hah D., Choi C., Jun C., Kim Y.

IEEE/LEOS International Conference on Optical MEMS, Hawaii, United States Of America, 18 - 21 August 2003, pp.151-152 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/omems.2003.1233511
  • City: Hawaii
  • Country: United States Of America
  • Page Numbers: pp.151-152
  • Abdullah Gül University Affiliated: Yes

Abstract

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of +/-1.4degrees at 66 V-DC was achieved for a 1-mm-diameter micromirror.