D. Hah Et Al. , "A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors," IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.151-152, 2003
Hah, D. Et Al. 2003. A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors. IEEE/LEOS International Conference on Optical MEMS , (Hawaii, United States Of America), 151-152.
Hah, D., Choi, C., Jun, C., & Kim, Y., (2003). A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors . IEEE/LEOS International Conference on Optical MEMS (pp.151-152). Hawaii, United States Of America
Hah, DOOYOUNG Et Al. "A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors," IEEE/LEOS International Conference on Optical MEMS, Hawaii, United States Of America, 2003
Hah, DOOYOUNG Et Al. "A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors." IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.151-152, 2003
Hah, D. Et Al. (2003) . "A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors." IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.151-152.
@conferencepaper{conferencepaper, author={DOOYOUNG HAH Et Al. }, title={A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors}, congress name={IEEE/LEOS International Conference on Optical MEMS}, city={Hawaii}, country={United States Of America}, year={2003}, pages={151-152} }