A 2D scanner by surface and bulk micromachined angular vertical comb actuators

Piyawattanametha W., Patterson P., HAH D. , Toshiyoshi H., Wu M. C.

International Conference on Optical MEMS and Their Applications, 18 - 21 August 2003, pp.93-94

  • Publication Type: Conference Paper / Full Text
  • Page Numbers: pp.93-94