A 2D scanner by surface and bulk micromachined angular vertical comb actuators

Piyawattanametha W., Patterson P., HAH D. , Toshiyoshi H., Wu M. C.

International Conference on Optical MEMS and Their Applications, 18 - 21 Ağustos 2003, ss.93-94

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Sayfa Sayıları: ss.93-94