A 2D scanner by surface and bulk micromachined angular vertical comb actuators

Piyawattanametha W., Patterson P., Hah D., Toshiyoshi H., Wu M.

IEEE/LEOS International Conference on Optical MEMS, Hawaii, United States Of America, 18 - 21 August 2003, pp.93-94 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/omems.2003.1233483
  • City: Hawaii
  • Country: United States Of America
  • Page Numbers: pp.93-94
  • Abdullah Gül University Affiliated: Yes


We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion-etching (DRIE) post process. Surface-micromacbining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of +/-6.2degrees (at 55 Vdc) and +/-4.1degrees (at 50 Vdc) for the inner and outer gimbals, respectively. The 1-mm mirror has a radius of curvature of 40 cm.