W. Piyawattanametha Et Al. , "A 2D scanner by surface and bulk micromachined angular vertical comb actuators," IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.93-94, 2003
Piyawattanametha, W. Et Al. 2003. A 2D scanner by surface and bulk micromachined angular vertical comb actuators. IEEE/LEOS International Conference on Optical MEMS , (Hawaii, United States Of America), 93-94.
Piyawattanametha, W., Patterson, P., Hah, D., Toshiyoshi, H., & Wu, M., (2003). A 2D scanner by surface and bulk micromachined angular vertical comb actuators . IEEE/LEOS International Conference on Optical MEMS (pp.93-94). Hawaii, United States Of America
Piyawattanametha, W Et Al. "A 2D scanner by surface and bulk micromachined angular vertical comb actuators," IEEE/LEOS International Conference on Optical MEMS, Hawaii, United States Of America, 2003
Piyawattanametha, W Et Al. "A 2D scanner by surface and bulk micromachined angular vertical comb actuators." IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.93-94, 2003
Piyawattanametha, W. Et Al. (2003) . "A 2D scanner by surface and bulk micromachined angular vertical comb actuators." IEEE/LEOS International Conference on Optical MEMS , Hawaii, United States Of America, pp.93-94.
@conferencepaper{conferencepaper, author={W Piyawattanametha Et Al. }, title={A 2D scanner by surface and bulk micromachined angular vertical comb actuators}, congress name={IEEE/LEOS International Conference on Optical MEMS}, city={Hawaii}, country={United States Of America}, year={2003}, pages={93-94} }