A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters | AVESİS

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A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters

Microsystem Technologies, vol.23, pp.3835-3842, 2017 (Journal Indexed in SCI)

Publication Type: Article / Article
Volume: 23
Publication Date: 2017
Doi Number: 10.1007/s00542-015-2736-8
Title of Journal : Microsystem Technologies
Page Numbers: pp.3835-3842