A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters
Hah D.
Microsystem Technologies, vol.23, pp.3835-3842, 2017 (Journal Indexed in SCI)
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Publication Type:
Article / Article
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Volume:
23
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Publication Date:
2017
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Doi Number:
10.1007/s00542-015-2736-8
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Title of Journal :
Microsystem Technologies
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Page Numbers:
pp.3835-3842