A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters

Hah D.

Microsystem Technologies, vol.23, pp.3835-3842, 2017 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 23
  • Publication Date: 2017
  • Doi Number: 10.1007/s00542-015-2736-8
  • Journal Name: Microsystem Technologies
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.3835-3842
  • Abdullah Gül University Affiliated: Yes