A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters


Hah D.

Microsystem Technologies, vol.23, pp.3835-3842, 2017 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 23
  • Publication Date: 2017
  • Doi Number: 10.1007/s00542-015-2736-8
  • Title of Journal : Microsystem Technologies
  • Page Numbers: pp.3835-3842