A low voltage actuated micromachined microwave switch using torsion springs and leverage

Hah D., Yoon E., Hong S.

IEEE MTT-S International Microwave Symposium (IMS2000), Massachusetts, Amerika Birleşik Devletleri, 11 - 16 Haziran 2000, ss.157-160 identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Basıldığı Şehir: Massachusetts
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.157-160
  • Abdullah Gül Üniversitesi Adresli: Hayır

Özet

New push-pull configuration using torsion springs and leverage for low-voltage actuated microwave switch is proposed. It is fabricated by surface micromachining and bas demonstrated the switch operation up to 4GHz, The actuation voltage is 6V and the isolation has been achieved more than 28dB by the push-pull configuration.