Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators


Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, Paris, France, 25 - 27 August 2021 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/dtip54218.2021.9568679
  • City: Paris
  • Country: France
  • Keywords: Microscanner, piezoelectric actuator, aluminum nitride, PZT
  • Abdullah Gül University Affiliated: Yes


Aluminum nitride (AlN) started to draw attentions as a material for piezoelectric actuation owing to its CMOS process compatibility and safeness for biomedical applications. Due to its relatively low piezoelectric coefficients, AlN-based piezoelectric actuators have been mostly operated in resonance modes, especially in optical scanning. This paper presents a novel design of a 2-axis-tilt microscanner with AlN piezoelectric quad-actuators and meander-shaped hinges for reasonable quasi-static operation. Through finite-element-method simulation, it is shown that the proposed device can have about 9 degree of optical scan angle in two dimensions with the voltage amplitude of 50 V. Lissajous scanning operation of the device is demonstrated as well via simulation.