Angular vertical comb-driven tunable capacitor with high-tuning capabilities

Nguyen H., Hah D. , Patterson P., Chao R., Piyawattanametha W., Lau E., ...Daha Fazla

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.13, sa.3, ss.406-413, 2004 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 13 Konu: 3
  • Basım Tarihi: 2004
  • Doi Numarası: 10.1109/jmems.2004.828741
  • Sayfa Sayıları: ss.406-413


This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb ringers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31 : 1, the highest ever reported. The maximum quality factor Q is 273 at I GHz near the minimum capacitance value.