Angular vertical comb-driven tunable capacitor with high-tuning capabilities
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.13, sa.3, ss.406-413, 2004 (SCI-Expanded)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 13 Sayı: 3
- Basım Tarihi: 2004
- Doi Numarası: 10.1109/jmems.2004.828741
- Dergi Adı: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.406-413
- Anahtar Kelimeler: angular vertical comb drive (AVC), BCB reflow, radio frequency microelectromechanical systems (RF MEMS), tunable capacitors
- Abdullah Gül Üniversitesi Adresli: Hayır
Özet
This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb ringers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31 : 1, the highest ever reported. The maximum quality factor Q is 273 at I GHz near the minimum capacitance value.