A low-voltage actuated micromachined microwave switch using torsion springs and leverage

Hah D., Yoon E., Hong S.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol.48, no.12, pp.2540-2545, 2000 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 48 Issue: 12
  • Publication Date: 2000
  • Doi Number: 10.1109/22.899010
  • Journal Name: IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.2540-2545
  • Keywords: microactuators, micromachining, microwave switches
  • Abdullah Gül University Affiliated: No

Abstract

In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is similar to5 V. The insertion loss of similar to1 dB and the isolation as high as similar to 40 dB at 1 GHz are achieved by the push-pull operation.