Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN(2) switches

Tsai J., Huang S., Hah D., Wu M.

12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), Massachusetts, United States Of America, 8 - 12 June 2003, pp.1776-1779 identifier

  • Publication Type: Conference Paper / Full Text
  • City: Massachusetts
  • Country: United States Of America
  • Page Numbers: pp.1776-1779
  • Abdullah Gül University Affiliated: Yes


A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N-2, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>+/-5degrees mechanical), low drive voltages (7V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1x8 (30 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 musec have been achieved.