Recent advances in optical MEMS devices and systems

Patterson P., Hah D., Lee M., Tsai J., Wu M.

Conference on Photonic Devices and Algorithms for Computing IV, Washington, United States Of America, 8 - 09 July 2002, vol.4788, pp.1-8 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 4788
  • Doi Number: 10.1117/12.453712
  • City: Washington
  • Country: United States Of America
  • Page Numbers: pp.1-8
  • Keywords: angular vertical combdirve, micromirrors, MEMS, NEMS, optical scanner, optical switch, photonic crystal, photonic bandgap, SOI-MEMS, SUMMiT-V, WDM
  • Abdullah Gül University Affiliated: Yes


We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.