Recent advances in optical MEMS devices and systems
Conference on Photonic Devices and Algorithms for Computing IV, Washington, Amerika Birleşik Devletleri, 8 - 09 Temmuz 2002, cilt.4788, ss.1-8
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Cilt numarası: 4788
- Doi Numarası: 10.1117/12.453712
- Basıldığı Şehir: Washington
- Basıldığı Ülke: Amerika Birleşik Devletleri
- Sayfa Sayıları: ss.1-8
- Anahtar Kelimeler: angular vertical combdirve, micromirrors, MEMS, NEMS, optical scanner, optical switch, photonic crystal, photonic bandgap, SOI-MEMS, SUMMiT-V, WDM
- Abdullah Gül Üniversitesi Adresli: Evet
Özet
We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.