Advanced MEMS for photonics

Wu M. C. , Patterson P., HAH D. , Lee M., Huang S., Tsai J.

60th Annual Device Research Conference, Santa Barbara, United States Of America, 24 - 26 June 2002, pp.13-16

  • Publication Type: Conference Paper / Full Text
  • City: Santa Barbara
  • Country: United States Of America
  • Page Numbers: pp.13-16