An optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p(+)-Si membrane

Hah D., Yoon E., Hong S.

SENSORS AND ACTUATORS A-PHYSICAL, vol.79, no.3, pp.204-210, 2000 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 79 Issue: 3
  • Publication Date: 2000
  • Doi Number: 10.1016/s0924-4247(99)00284-8
  • Journal Name: SENSORS AND ACTUATORS A-PHYSICAL
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.204-210
  • Keywords: optomechanical pressure sensor, multimode interference couplers, p(+)-Si membrane, polymer waveguides, bulk micromachining, SILICON
  • Abdullah Gül University Affiliated: No

Abstract

We report a new optomechanical pressure sensor using multimode interference (MM) couplers with polymer waveguides and a thin p(+)-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO2 multi-layer system The devices have been fabricated on the thin p(+)-Si membranes which are selectively etched using bulb: micromachining. Device size is 0.4 mm (width) x 13 mm (length) and the total thickness of the membrane is 7 mu m. The device characteristics are measured using a He-Ne laser (lambda = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa. (C) 2000 Elsevier Science S.A. All rights reserved.