Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits

Chi C., Tsai J., Hah D., Jeong K., Wu M.

10th IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finlandiya, 1 - 04 Ağustos 2005, ss.131-132

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/omems.2005.1540113
  • Basıldığı Şehir: Oulu
  • Basıldığı Ülke: Finlandiya
  • Sayfa Sayıları: ss.131-132
  • Anahtar Kelimeler: MEMS, on-chip micromirror, planar lightwave circuits, rotary comb-drive, SIM, solid-immersion micromirror
  • Abdullah Gül Üniversitesi Adresli: Hayır

Özet

We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved.