Solid-immersion micromirror with enhanced angular deflection for silicon based planar lightwave circuits


Chi C., Tsai J., HAH D. , Jeong K., Wu M. C.

International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1 - 04 August 2005, pp.131-132

  • Publication Type: Conference Paper / Full Text
  • City: Oulu
  • Country: Finland
  • Page Numbers: pp.131-132