Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits

Chi C., Tsai J., Hah D., Jeong K., Wu M.

10th IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1 - 04 August 2005, pp.131-132 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/omems.2005.1540113
  • City: Oulu
  • Country: Finland
  • Page Numbers: pp.131-132
  • Keywords: MEMS, on-chip micromirror, planar lightwave circuits, rotary comb-drive, SIM, solid-immersion micromirror
  • Abdullah Gül University Affiliated: No


We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved.