10th IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1 - 04 August 2005, pp.131-132
We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved.