Atıf İçin Kopyala
Chi C., Tsai J., Hah D., Jeong K., Wu M.
10th IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finlandiya, 1 - 04 Ağustos 2005, ss.131-132
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Yayın Türü:
Bildiri / Tam Metin Bildiri
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Doi Numarası:
10.1109/omems.2005.1540113
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Basıldığı Şehir:
Oulu
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Basıldığı Ülke:
Finlandiya
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Sayfa Sayıları:
ss.131-132
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Anahtar Kelimeler:
MEMS, on-chip micromirror, planar lightwave circuits, rotary comb-drive, SIM, solid-immersion micromirror
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Abdullah Gül Üniversitesi Adresli:
Hayır
Özet
We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved.