Scanning micromirrors: an overview


Patterson P., HAH D. , Fujino M., Piyawattanametha W., Wu M. C.

SPIE, Optomechatronic Micro/Nano Components, Devices, and Systems, Philadelphia, United States Of America, 25 October 2004, vol.5604, pp.196-207

  • Publication Type: Conference Paper / Full Text
  • Volume: 5604
  • City: Philadelphia
  • Country: United States Of America
  • Page Numbers: pp.196-207