Scanning micromirrors: An overview

Patterson P., Hah D., Fujino M., Piyawattanametha W., Wu M.

Conference on Optomechatronic Micro/Nano Components, Devices and Systems, Pennsylvania, United States Of America, 27 - 28 October 2004, vol.5604, pp.195-207 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 5604
  • Doi Number: 10.1117/12.582849
  • City: Pennsylvania
  • Country: United States Of America
  • Page Numbers: pp.195-207
  • Keywords: scanning micromirror, MEMS, optical switching, MOEMS, vertical combdrive, MEMS MIRROR, SILICON
  • Abdullah Gül University Affiliated: No


An overview of the current state of the art in scanning micromirror technology for switching, imaging, and beam steering applications is presented. The requirements that drive the design and fabrication technology are covered. Electrostatic, electromagnetic, and magnetic actuation techniques are discussed as well as the motivation toward combdrive configurations from parallel plate configurations for large diameter (mm range) scanners. Suitability of surface micromachining, bulk micromachining, and silicon on insulator (SOI) micromachining technology is presented in the context of the length scale and performance for given scanner applications.