Integration of a honeycomb micromirror with a surface micromachined 2D scanner for improved performance


Patterson P., Su G., HAH D. , Wu M. C.

AVS 48th International Symposium, San Francisco, United States Of America, 29 October - 02 November 2001, pp.1

  • Publication Type: Conference Paper / Summary Text
  • City: San Francisco
  • Country: United States Of America
  • Page Numbers: pp.1