Performance Improvement of a Two-Axis Radial-Vertical-Combdrive Scanner by Using a Symmetric Spring Design
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Almanya, 11 - 14 Ağustos 2008, ss.108-109
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Doi Numarası: 10.1109/omems.2008.4607852
- Basıldığı Şehir: Freiburg
- Basıldığı Ülke: Almanya
- Sayfa Sayıları: ss.108-109
- Anahtar Kelimeler: Symmetric spring, two-axis scanner, radial comb-drive actuators, small form factor, surface micromachining
- Abdullah Gül Üniversitesi Adresli: Hayır
Özet
A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mu m thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are +/- 5.33 degrees (50.7V) and +/- 6.04 degrees (52.8V) for rotation about the x- and y-axes, respectively.