Performance Improvement of a Two-Axis Radial-Vertical-Combdrive Scanner by Using a Symmetric Spring Design

Hsieh T., Chang Y., Chiou S., Tsai J., Hah D., Wu M. C.

IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, 11 - 14 August 2008, pp.108-109 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/omems.2008.4607852
  • City: Freiburg
  • Country: Germany
  • Page Numbers: pp.108-109
  • Keywords: Symmetric spring, two-axis scanner, radial comb-drive actuators, small form factor, surface micromachining
  • Abdullah Gül University Affiliated: No


A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mu m thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are +/- 5.33 degrees (50.7V) and +/- 6.04 degrees (52.8V) for rotation about the x- and y-axes, respectively.