Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design

Hsieh T., Chang Y., Chiou S., Tsai J., HAH D. , Wu M. C.

International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, 11 - 14 August 2008, pp.108-109

  • Publication Type: Conference Paper / Full Text
  • City: Freiburg
  • Country: Germany
  • Page Numbers: pp.108-109