Performance Improvement of a Two-Axis Radial-Vertical-Combdrive Scanner by Using a Symmetric Spring Design

Hsieh T., Chang Y., Chiou S., Tsai J., Hah D., Wu M. C.

IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Almanya, 11 - 14 Ağustos 2008, ss.108-109 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/omems.2008.4607852
  • Basıldığı Şehir: Freiburg
  • Basıldığı Ülke: Almanya
  • Sayfa Sayıları: ss.108-109
  • Anahtar Kelimeler: Symmetric spring, two-axis scanner, radial comb-drive actuators, small form factor, surface micromachining
  • Abdullah Gül Üniversitesi Adresli: Hayır

Özet

A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mu m thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are +/- 5.33 degrees (50.7V) and +/- 6.04 degrees (52.8V) for rotation about the x- and y-axes, respectively.