A high fill-factor, large scan-angle, two-axis analog micromirror array driven by leverage mechanism


Tsai J., Fan L., HAH D. , Wu M. C.

International Conference on Optical MEMS and Their Applications, Takamatsu, Japan, 22 - 26 August 2004, pp.30-31

  • Publication Type: Conference Paper / Full Text
  • City: Takamatsu
  • Country: Japan
  • Page Numbers: pp.30-31