two-axis MEMS scanner driven by radial vertical combdrive actuators

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Chiou S., Hsieh T., Tsai J., Sun C., HAH D. , Wu M. C.

International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, 12 - 16 August 2007, pp.83-84

• Publication Type: Conference Paper / Full Text
• City: Hualien
• Country: Taiwan
• Page Numbers: pp.83-84