two-axis MEMS scanner driven by radial vertical combdrive actuators


Chiou S., Hsieh T., Tsai J., Sun C., HAH D. , Wu M. C.

International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, 12 - 16 August 2007, pp.83-84

  • Publication Type: Conference Paper / Full Text
  • City: Hualien
  • Country: Taiwan
  • Page Numbers: pp.83-84