Two-axis MEMS scanners with radial vertical combdrive actuators - design, theoretical analysis, and fabrication


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Tsai J., Chiou S., Hsieh T., Sun C., Hah D. , Wu M. C.

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, vol.10, no.4, 2008 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 10 Issue: 4
  • Publication Date: 2008
  • Doi Number: 10.1088/1464-4258/10/4/044006
  • Title of Journal : JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS

Abstract

We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.