Planar MEMS Variable Optical Attenuators (VOAs) with Linear Attenuation-Voltage Characteristics


HAH D.

2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019, Paris, France, 12 - 15 May 2019 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/dtip.2019.8752938
  • City: Paris
  • Country: France
  • Abdullah Gül University Affiliated: Yes