Planar MEMS Variable Optical Attenuators (VOAs) with Linear Attenuation-Voltage Characteristics

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HAH D.

2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019, Paris, France, 12 - 15 May 2019

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/dtip.2019.8752938
• City: Paris
• Country: France