Optomechanical pressure sensors using multi-mode interference couplers on thin p+-Si membranes

HAH D. , Yoon E., Hong S.

The 6th Korean Conference on Semiconductor, Seoul, South Korea, 01 February 1999, pp.175-176

  • Publication Type: Conference Paper / Full Text
  • City: Seoul
  • Country: South Korea
  • Page Numbers: pp.175-176