Optomechanical pressure sensors using multi-mode interference couplers on thin p+-Si membranes

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HAH D. , Yoon E., Hong S.

The 6th Korean Conference on Semiconductor, Seoul, South Korea, 01 February 1999, pp.175-176

• Publication Type: Conference Paper / Full Text
• City: Seoul
• Country: South Korea
• Page Numbers: pp.175-176