Silicon-based on-chip micromirrors for DWDM wavelength-selective crossconnects

Chi C., Hou C., Lee C., HAH D., Wu M. C.

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, Amerika Birleşik Devletleri, 21 - 24 Ağustos 2006, ss.130-131

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Basıldığı Şehir: Big Sky, MT
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.130-131
  • Anahtar Kelimeler: Comb-drive, MEMS, On-chip micromirror, Planar lightwave circuits, PLC, WDM
  • Abdullah Gül Üniversitesi Adresli: Evet

Özet

We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-μm mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved. © 2006 IEEE.