IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States Of America, 21 - 24 August 2006, pp.130-131
Conference Paper / Full Text
Big Sky, MT
United States Of America
Comb-drive, MEMS, On-chip micromirror, Planar lightwave circuits, PLC, WDM
Abdullah Gül University Affiliated:
We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-μm mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved. © 2006 IEEE.