Silicon-based on-chip micromirrors for DWDM wavelength-selective crossconnects

Chi C., Hou C., Lee C., HAH D., Wu M. C.

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States Of America, 21 - 24 August 2006, pp.130-131 identifier

  • Publication Type: Conference Paper / Full Text
  • City: Big Sky, MT
  • Country: United States Of America
  • Page Numbers: pp.130-131
  • Keywords: Comb-drive, MEMS, On-chip micromirror, Planar lightwave circuits, PLC, WDM
  • Abdullah Gül University Affiliated: Yes

Abstract

We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-μm mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved. © 2006 IEEE.