Analytical design of MEMS variable capacitors based on shaped-finger comb-drives

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Hah D.

Microsystem Technologies, 2019 (SCI-Expanded)

• Publication Type: Article / Article
• Publication Date: 2019
• Doi Number: 10.1007/s00542-019-04362-x
• Journal Name: Microsystem Technologies
• Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
• Abdullah Gül University Affiliated: Yes