Analytical design of MEMS variable capacitors based on shaped-finger comb-drives
Copy For Citation
Hah D.
Microsystem Technologies, 2019 (SCI-Expanded)
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Publication Type:
Article / Article
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Publication Date:
2019
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Doi Number:
10.1007/s00542-019-04362-x
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Journal Name:
Microsystem Technologies
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Journal Indexes:
Science Citation Index Expanded (SCI-EXPANDED), Scopus
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Abdullah Gül University Affiliated:
Yes