Analytical design of MEMS variable capacitors based on shaped-finger comb-drives


Hah D.

Microsystem Technologies, 2019 (SCI Expanded İndekslerine Giren Dergi) identifier

  • Yayın Türü: Makale / Tam Makale
  • Basım Tarihi: 2019
  • Doi Numarası: 10.1007/s00542-019-04362-x
  • Dergi Adı: Microsystem Technologies