Analytical design of MEMS variable capacitors based on shaped-finger comb-drives


Hah D.

Microsystem Technologies, 2019 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Publication Date: 2019
  • Doi Number: 10.1007/s00542-019-04362-x
  • Journal Name: Microsystem Technologies
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Abdullah Gül University Affiliated: Yes