Analytical design of linear variable capacitors with shaped-finger comb-drive actuators


HAH D.

20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, Roma, Italy, 22 - 25 May 2018, pp.1-5 identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/dtip.2018.8394217
  • City: Roma
  • Country: Italy
  • Page Numbers: pp.1-5