Analytical design of linear variable capacitors with shaped-finger comb-drive actuators | AVESİS

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Analytical design of linear variable capacitors with shaped-finger comb-drive actuators

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20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, Roma, Italy, 22 - 25 May 2018, pp.1-5

Publication Type: Conference Paper / Full Text
Doi Number: 10.1109/dtip.2018.8394217
City: Roma
Country: Italy
Page Numbers: pp.1-5
Abdullah Gül University Affiliated: Yes