Microelectromechanical scanning devices for optical networking applications

Wu M. C., HAH D., Patterson P. R., Toshiyoshi H.

2002 IEEE International Solid-State Circuits Conference, San Francisco, CA, Amerika Birleşik Devletleri, 3 - 07 Şubat 2002, ss.288 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Basıldığı Şehir: San Francisco, CA
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.288
  • Abdullah Gül Üniversitesi Adresli: Evet

Özet

The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.