Microelectromechanical scanning devices for optical networking applications

Wu M. C., HAH D., Patterson P. R., Toshiyoshi H.

2002 IEEE International Solid-State Circuits Conference, San Francisco, CA, United States Of America, 3 - 07 February 2002, pp.288 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: San Francisco, CA
  • Country: United States Of America
  • Page Numbers: pp.288
  • Abdullah Gül University Affiliated: Yes


The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.