2002 IEEE International Solid-State Circuits Conference, San Francisco, CA, United States Of America, 3 - 07 February 2002, pp.288
The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.