A surface and bulk micromachined angular vertical combdrive for scanning micromirrors


Piyawattanametha W., Patterson P., HAH D. , Toshiyoshi H., Wu M. C.

OFC 2003, Atlanta, United States Of America, 23 - 28 March 2003, pp.251-252

  • Publication Type: Conference Paper / Full Text
  • City: Atlanta
  • Country: United States Of America
  • Page Numbers: pp.251-252