A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

Piyawattanametha W., Patterson P., Wu M., HAH D., Toshiyoshi H.

Optical Fiber Communication Conference (OFC), Atlanta, United States Of America, vol.86, pp.251-252 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 86
  • City: Atlanta
  • Country: United States Of America
  • Page Numbers: pp.251-252
  • Abdullah Gül University Affiliated: Yes


A high performance scanning micromirror with angular vertical comb actuators was developed, which is realized by combining MUMPs with a 3-mask deep reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) was achieved at 40V. Scanners with 40-um-thick micromirrors and angular vertical comb fingers were successfully fabricated. The resonant frequency was achieved at 661 Hz. The proposed process can be directly extended to 2D scanners where more complex electrical interconnect is required.