Design of electrostatic actuators for MOEMS applications


HAH D. , Toshiyoshi H., Wu M. C.

Symposium on Design, Test, Integration and Packaging for MEMS/MOEMS, Cannes, France, 6 - 08 May 2002, pp.200-207

  • Publication Type: Conference Paper / Full Text
  • City: Cannes
  • Country: France
  • Page Numbers: pp.200-207