An optomechanical pressure sensor using multimode interference couplers

Hah D., Yoon E., Hong S.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol.38, pp.2664-2668, 1999 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 38
  • Publication Date: 1999
  • Doi Number: 10.1143/jjap.38.2664
  • Journal Name: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.2664-2668
  • Keywords: optomechanical pressure sensor, multimode interference couplers, p(+)-Si membrane, strip-loaded silica waveguide, photoelastic effect
  • Abdullah Gül University Affiliated: No

Abstract

A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors.