An optomechanical pressure sensor using multimode interference couplers


Hah D. , Yoon E., Hong S.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, cilt.38, ss.2664-2668, 1999 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 38
  • Basım Tarihi: 1999
  • Doi Numarası: 10.1143/jjap.38.2664
  • Dergi Adı: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
  • Sayfa Sayıları: ss.2664-2668

Özet

A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors.