An optomechanical pressure sensor using multimode interference couplers
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, cilt.38, ss.2664-2668, 1999 (SCI-Expanded)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 38
- Basım Tarihi: 1999
- Doi Numarası: 10.1143/jjap.38.2664
- Dergi Adı: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.2664-2668
- Anahtar Kelimeler: optomechanical pressure sensor, multimode interference couplers, p(+)-Si membrane, strip-loaded silica waveguide, photoelastic effect
- Abdullah Gül Üniversitesi Adresli: Hayır
Özet
A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors.