A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers

HAH D., Huang S., Nguyen H., Chang H., Wu M. C., Toshiyoshi H.

Optical Fiber Communication Conference, OFC 2002, California, United States Of America, 17 March 2002, pp.92-93 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: California
  • Country: United States Of America
  • Page Numbers: pp.92-93
  • Abdullah Gül University Affiliated: Yes