A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

HAH D. , Huang S., Nguyen H., Chang H., Toshiyoshi H., Wu M. C.

OFC 2002, Anaheim, United States Of America, 17 - 22 March 2002, pp.92-93

  • Publication Type: Conference Paper / Full Text
  • City: Anaheim
  • Country: United States Of America
  • Page Numbers: pp.92-93