A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers

HAH D., Huang S., Nguyen H., Chang H., Wu M. C. , Toshiyoshi H.

Optical Fiber Communication Conference, OFC 2002, California, United States Of America, 17 March 2002, pp.92-93 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: California
  • Country: United States Of America
  • Page Numbers: pp.92-93
  • Abdullah Gül University Affiliated: Yes