Balkan Journal of Electrical and Computer Engineering, vol.10, no.1, pp.30-34, 2022 (Peer-Reviewed Journal)
In this work, optimization of the nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nano-pillars's height, incline angle, array properties are systematically optimized. Full field Finite Difference Time Domain method is used to simulate EM fields and calculate the reflection from the modified nanostructured substrate surfaces in 400nm-1100nm spectral range. Optimization recipe is clearly presented and it is not only useful for square arrays but for regular arrays of nano-pillars in general.