IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, Amerika Birleşik Devletleri, 21 - 24 Ağustos 2006, ss.130-131
We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-μm mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved. © 2006 IEEE.