A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

Piyawattanametha W., Patterson P., Wu M., HAH D., Toshiyoshi H.

Optical Fiber Communication Conference (OFC), Atlanta, Amerika Birleşik Devletleri, cilt.86, ss.251-252 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası: 86
  • Basıldığı Şehir: Atlanta
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.251-252
  • Abdullah Gül Üniversitesi Adresli: Evet

Özet

A high performance scanning micromirror with angular vertical comb actuators was developed, which is realized by combining MUMPs with a 3-mask deep reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) was achieved at 40V. Scanners with 40-um-thick micromirrors and angular vertical comb fingers were successfully fabricated. The resonant frequency was achieved at 661 Hz. The proposed process can be directly extended to 2D scanners where more complex electrical interconnect is required.