Piyawattanametha, W. Et Al. 2005. Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.6 , 1329-1338.

Piyawattanametha, W., Patterson, P., Hah, D., Toshiyoshi, H., & Wu, M., (2005). Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.6, 1329-1338.

Piyawattanametha, W Et Al. "Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.6, 1329-1338, 2005

Piyawattanametha, W Et Al. "Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.6, pp.1329-1338, 2005

Piyawattanametha, W. Et Al. (2005) . "Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.6, pp.1329-1338.

@article{article, author={W Piyawattanametha Et Al. }, title={Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2005, pages={1329-1338} }