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Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors
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D. Hah Et Al. , "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors," IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3, pp.505-513, 2004

Hah, D. Et Al. 2004. Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3 , 505-513.

Hah, D., Patterson, P., Nguyen, H., Toshiyoshi, H., & Wu, M., (2004). Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3, 505-513.

Hah, DOOYOUNG Et Al. "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors," IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3, 505-513, 2004

Hah, DOOYOUNG Et Al. "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors." IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3, pp.505-513, 2004

Hah, D. Et Al. (2004) . "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors." IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS , vol.10, no.3, pp.505-513.

@article{article, author={DOOYOUNG HAH Et Al. }, title={Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors}, journal={IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS}, year=2004, pages={505-513} }