Hah, D. Et Al. 2004. A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.14, no.8 , 1148-1156.

Hah, D., Choi, C., Kim, C., & Jun, C., (2004). A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.14, no.8, 1148-1156.

Hah, DOOYOUNG Et Al. "A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.14, no.8, 1148-1156, 2004

Hah, DOOYOUNG Et Al. "A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.14, no.8, pp.1148-1156, 2004

Hah, D. Et Al. (2004) . "A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.14, no.8, pp.1148-1156.

@article{article, author={DOOYOUNG HAH Et Al. }, title={A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2004, pages={1148-1156} }